自由空间光学用PZT驱动两轴旋转微镜的制备与表征

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906542

Y. Yee, J. Bu, Man-Hyo Ha, Junghoon Choi, Hyun-Ah Oh, Sangshin Lee, H. Nam

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引用次数: 23

摘要

设计并制作了一种绕正交轴旋转运动的二自由度驱动微镜。悬浮式单晶PZT致动器独立控制微镜沿两个垂直轴的旋转。压电陶瓷作动器对称地围绕作动器的轴线，在其运行过程中通过平衡架结构相互机械隔离。由于万向节的存在，驱动轴之间的机械串扰被很好地抑制在7%以下。在施加15 V偏压的情况下，微镜的旋转角度/spl θ /达到0.75/spl°/，同时保持了反射激光束的轮廓而没有明显的衰减。

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Fabrication and characterization of a PZT actuated micromirror with two-axis rotational motion for free space optics

An actuated micromirror having two-degree of freedom in rotational motion around the orthogonal axes is designed and fabricated. Suspended unimorph PZT actuators independently control the rotation of the micromirror along the two perpendicular axes. The PZT actuators located symmetrically around the axes of the actuation are mechanically isolated with each other during their operation by a gimbaled structure. The mechanical cross talk between each axis of actuation is well suppressed less than 7% due to the gimbals. The rotation angle /spl theta/ of the micromirror reaches 0.75/spl deg/ under the applied bias of 15 V while maintaining the profile of the reflected laser beam without significant degradation.

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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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