{"title":"基于深度学习的混合键合缺陷分类","authors":"Rahul Reddy Komatireddi, Sachin Dangayach, Prayudi Lianto, Rohith Cherikkallil, Sneha Rupa","doi":"10.1109/EPTC56328.2022.10013145","DOIUrl":null,"url":null,"abstract":"In the semiconductor industry, defect detection is very important as it affects performance. In Hybrid Bonding, identifying defect types prior to bonding is critical in determining bonding performance. To overcome this challenge, we propose a solution involving Computer Vision and Deep Learning to accomplish classification of these defects with limited availability of data. With this approach, the defect identification time is reduced, thereby driving faster research and product development.","PeriodicalId":163034,"journal":{"name":"2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)","volume":"123 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Defect Classification using Deep Learning for Hybrid Bonding Application\",\"authors\":\"Rahul Reddy Komatireddi, Sachin Dangayach, Prayudi Lianto, Rohith Cherikkallil, Sneha Rupa\",\"doi\":\"10.1109/EPTC56328.2022.10013145\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the semiconductor industry, defect detection is very important as it affects performance. In Hybrid Bonding, identifying defect types prior to bonding is critical in determining bonding performance. To overcome this challenge, we propose a solution involving Computer Vision and Deep Learning to accomplish classification of these defects with limited availability of data. With this approach, the defect identification time is reduced, thereby driving faster research and product development.\",\"PeriodicalId\":163034,\"journal\":{\"name\":\"2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)\",\"volume\":\"123 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-12-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EPTC56328.2022.10013145\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE 24th Electronics Packaging Technology Conference (EPTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EPTC56328.2022.10013145","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Defect Classification using Deep Learning for Hybrid Bonding Application
In the semiconductor industry, defect detection is very important as it affects performance. In Hybrid Bonding, identifying defect types prior to bonding is critical in determining bonding performance. To overcome this challenge, we propose a solution involving Computer Vision and Deep Learning to accomplish classification of these defects with limited availability of data. With this approach, the defect identification time is reduced, thereby driving faster research and product development.