SiC上应变AlN/GaN/AlN量子阱场效应管的首次演示

S. Islam, M. Qi, B. Song, K. Nomoto, V. Protasenko, Jingshan Wang, S. Rouvimov, P. Fay, H. Xing, D. Jena
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引用次数: 3

摘要

这是在SiC衬底上首次展示应变AlN/GaN/AlN量子阱场效应管。器件性能,虽然非常令人鼓舞的栅极长度使用,可以通过缩放显着提高[4]。但通过确保二维空穴气体的存在,以及探索碳化硅上厚AlN缓冲层的高温生长,有望取得重大进展。这可以潜在地减少后续层中螺纹位错的产生,并通过改善传输特性来提高FET的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
First demonstration of strained AlN/GaN/AlN quantum well FETs on SiC
This is the first demonstration of strained AlN/GaN/AlN quantum well FETs on SiC substrates. The device performance, though highly encouraging for the gate lengths used, can be significantly enhanced by scaling [4]. But significant improvements are expected by ensuring the absence of the 2D hole gas, and by exploring high temperature growth of thick AlN buffer layer on SiC. This can potentially reduce the generation of threading dislocations in the subsequent layers and enhance the FET performance, by improving the transport properties.
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