硅质音叉

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77968

R. Buser, N. D. de Rooij

{"title":"硅质音叉","authors":"R. Buser, N. D. de Rooij","doi":"10.1109/MEMSYS.1989.77968","DOIUrl":null,"url":null,"abstract":"The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 mu bar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":"{\"title\":\"Tuning forks in silicon\",\"authors\":\"R. Buser, N. D. de Rooij\",\"doi\":\"10.1109/MEMSYS.1989.77968\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 mu bar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures.<<ETX>>\",\"PeriodicalId\":369505,\"journal\":{\"name\":\"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'\",\"volume\":\"24 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-02-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"17\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1989.77968\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1989.77968","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 17

摘要

作者描述了在硅中采用电动力激励的微加工音叉。用干涉仪在1 μ bar ~ 2 μ bar的压力范围内测量了谐振频率与q因子的压力依赖性。结果表明，硅中的微加工结构具有与类似石英结构相当的q因子。

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Tuning forks in silicon

The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 mu bar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures.<>

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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