基于自动迈克尔逊干涉测量系统的二氧化硅玻璃条纹可见性分析

C. K. Lim, W. Norhaimi, Z. Sauli, V. Retnasamy, M. Aziz, S. Taniselass, A. A. Bakhit
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引用次数: 0

摘要

提出了一种基于迈克尔逊干涉法产生条纹的非接触测量方法,用于分析透明二氧化硅(SiO2)玻璃的条纹可见度。在迈克尔逊干涉仪上实现了一个自动微控制步进电机,以在可移动镜上提供微小的微位移,并使条纹移位。通过条纹能见度测量,通过微控制步进电机条纹移动允许一致和精确的测量。对几种用氢氟酸蚀刻的样品进行了条纹可见性分析。石英玻璃经HF腐蚀后得到的主要条纹可见度在0.67 ~ 0.73之间。随着HF蚀刻时间的缩短,石英玻璃样品的条纹可见度增加。研究结果表明,采用微控制步进电机进行条纹自动移位,减少了人为误差,在强度测量中具有更好的分辨率,可以更准确地测量条纹的可见度。条纹可见性分析也有助于其他透明和反射薄膜的表面轮廓分析。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fringe visibility analysis on silica glass based on automated Michelson interferometry system
A non-contact measurement method based on fringes produced from Michelson interferometry for fringe visibility analysis of transparent silica (SiO2) glass has been developed. An automatic micro-controlled stepper motor is implemented on the Michelson Interferometer to provide small micro displacement on the movable mirror and enable fringe shift. Through fringe visibility measurement, fringe shifting through micro-controlled stepper motor allows consistent and precise measurement. Analysis of fringe visibility was conducted on several samples etched with Hydrofluoric (HF) acid. The main fringe visibilities obtained after the silica glass were etched with HF ranged from 0.67-0.73. Fringe visibility of the silica glass samples increased when the time of etching of HF was reduced. Based on the results obtained the automatic fringe shift with micro-controlled stepper motor reduced human error and has better resolution in intensity measurement which allows fringe visibility to be measured more accurately. The fringe visibility analysis can also assist in surface profiling of other transparent and reflective thin films.
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