M. Ashauer, H. Glosch, F. Hedrich, N. Hey, H. Sandmaier, W. Lang
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A new type of a flow sensor is presented which is based on a thermal principle. The combination of two detecting methods results both in a considerable increase in measuring range (0.1 to 150 mm/s) and in a shorter reaction time of less than 2 ms. Furthermore, the sensor is furthermore relatively insensitive to pollution. Devices were manufactured and successfully tested for liquids and gases.
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