为整个离子注入模块的生命安全系统的应用提供了一种有效的方案

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Pub Date : 1900-01-01 DOI:10.1109/IIT.2002.1258047

N. Rivera, M. Sherrett, J. Mayer

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引用次数: 0

摘要

离子注入晶圆厂模块在给定的晶圆厂内使用一些最有毒的材料。本文讨论了覆盖整个模块的最佳方法，以及使用适当的监测技术来自信地检测气体材料，如砷、磷化氢、三氟化硼、四氟化硅和四氟化锗的细节。来自用户网站的反馈将被引用作为这个应用程序的成功。

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An effective scheme for the application of a life safety system for the entire ion implant module

An ion implantation fab module uses some of the most toxic materials within a given fab site. The paper discusses an optimum approach to cover an entire module as well as the details of using the proper monitoring technology to confidently detect gas materials such as arsine, phosphine, boron trifluoride, silicon tetrafluoride and germanium tetrafluoride. Feedback from user sites will be cited as to the success of this application.

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来源期刊

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on

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