The structural changes of surfaces of solar cell protective coatings under combined electron-proton irradiation

Combined irradiation of glasses by 40-keV electrons and 20-keV protons was carried out in a vacuum chamber at pressure of 10–4 Pa; flux densities of electrons $\varphi _{e}$ and protons $\varphi _{p}$ were varied within $2\times 10^{10}$ to $5\times 10^{11}~cm^{-2}s^{-1}$. Structural changes of glass surfaces after irradiation were monitored by the Atomic Force Microscopy (AFM). Irradiation of samples was carried out with the use of stepwise increase of $\varphi_{\text{e}}$ and $\varphi_{\text{p}}$. Analysis of such samples allowed studying the creation and evolution of microscopic structures on their surfaces. It was found that nature of the structural changes is determined by $\varphi_{\text{e}}$ and $\varphi_{\text{p}}$ and their ratio.