用石英模直接纳米压印在亚克力板上制造纳米室

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI:10.1109/IMNC.2001.984110

Y. Hirai, N. Takagi, H. Toyota, S. Harada, T. Yotsuya, Y. Tanaka

{"title":"用石英模直接纳米压印在亚克力板上制造纳米室","authors":"Y. Hirai, N. Takagi, H. Toyota, S. Harada, T. Yotsuya, Y. Tanaka","doi":"10.1109/IMNC.2001.984110","DOIUrl":null,"url":null,"abstract":"Nano-imprint lithography (S.Chou et al, J. Vac. Sci. Technol. vol. B14, p. 4129-4133, 1996) is a promising technology for nano structure fabrication with low cost. Several applications have been reported, whose targets are mainly fabrication of Si ULSI or other electric devices. In this work, we demonstrate nano holes fabrication on an acrylic plate using a quartz mold. The imprinted patterns could be applied to nano chambers for DNA analysis or anti-reflection structures for diffractive optical elements.","PeriodicalId":202620,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Nano chamber fabrication on an acrylic plate by direct nano imprint lithography using quartz mold\",\"authors\":\"Y. Hirai, N. Takagi, H. Toyota, S. Harada, T. Yotsuya, Y. Tanaka\",\"doi\":\"10.1109/IMNC.2001.984110\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nano-imprint lithography (S.Chou et al, J. Vac. Sci. Technol. vol. B14, p. 4129-4133, 1996) is a promising technology for nano structure fabrication with low cost. Several applications have been reported, whose targets are mainly fabrication of Si ULSI or other electric devices. In this work, we demonstrate nano holes fabrication on an acrylic plate using a quartz mold. The imprinted patterns could be applied to nano chambers for DNA analysis or anti-reflection structures for diffractive optical elements.\",\"PeriodicalId\":202620,\"journal\":{\"name\":\"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-10-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.2001.984110\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.2001.984110","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

纳米压印技术[S.Chou等，J. Vac。科学。抛光工艺。vol. B14, p. 4129-4133, 1996)是一种很有前途的低成本纳米结构制造技术。已经报道了几种应用，其目标主要是制造Si ULSI或其他电子器件。在这项工作中，我们演示了使用石英模具在丙烯酸板上制造纳米孔。印迹图案可应用于DNA分析的纳米室或衍射光学元件的抗反射结构。

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Nano chamber fabrication on an acrylic plate by direct nano imprint lithography using quartz mold

Nano-imprint lithography (S.Chou et al, J. Vac. Sci. Technol. vol. B14, p. 4129-4133, 1996) is a promising technology for nano structure fabrication with low cost. Several applications have been reported, whose targets are mainly fabrication of Si ULSI or other electric devices. In this work, we demonstrate nano holes fabrication on an acrylic plate using a quartz mold. The imprinted patterns could be applied to nano chambers for DNA analysis or anti-reflection structures for diffractive optical elements.

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Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)

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