退火质子交换LiNbO/ sub3 /波导中表面声波的温度特性

Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002. Pub Date : 2002-05-28 DOI:10.1109/ISAF.2002.1195954

Chien-Chuan Cheng, K. Kao, Ying-Chung Chen

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引用次数: 0

摘要

研究了表面声波在退火质子交换(APE) LiNbO/ sub3 /波导中的温度特性。实验研究了z-cut LiNbO/ sub3 /底物浸在纯辛酸中的工艺。假设氢的穿透深度等于波导深度(d)，用二次离子质谱法(SIMS)测量了氢的穿透深度。退火过程在水平炉中进行，温度为400/spl℃，干燥O/sub / 2气流下，退火时间为4 h。用网络分析仪测量了声表面波的速度(V/sub p/)和频率温度系数(TCF)。结果表明，与PE LiNbO/ sub3 /样品相比，APE LiNbO/ sub3 /样品的V/sub p/和TCF有提高的趋势。结果表明，退火效应可以使降低的V/sub p/恢复，并提高TCF。而APE LiNbO/sub 3/样品的TCF值比未交换样品的TCF值大。

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Temperature characteristics for surface acoustic wave in annealed proton-exchanged LiNbO/sub 3/ waveguides

The temperature characteristics for surface acoustic wave (SAW) in annealed proton-exchanged (APE) LiNbO/sub 3/ waveguides were investigated. The process performed by immersing z-cut LiNbO/sub 3/ substrates in pure octanoic acid was experimentally studied. The penetration depth of hydrogen assumed to be equal to the waveguide depth (d) was measured by secondary-ion mass spectrometry (SIMS). The annealing process was carried out in a horizontal furnace kept at 400/spl deg/C for 4 h under a dry O/sub 2/ gas flow. The velocity (V/sub p/) and temperature coefficient of frequency (TCF) of SAW measured by a network analyzer were observed. The results showed that the V/sub p/ and TCF in APE LiNbO/sub 3/ samples tended to improve in comparison with the PE LiNbO/sub 3/ samples. It exhibited that the annealing effect could result in a restoration of the decreased V/sub p/ and an improvement of TCF. However, the values of TCF in APE LiNbO/sub 3/ samples were larger than that of the unexchanged one.

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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.

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