Impact of minienvironments on facilities cost

The Strategic Future Fab Study considered minienvironments as an alternative to more traditional "ballroom" full filter ceiling design configurations. The study determined that there were real cost savings associated with implementing minienvironment use. Tangible savings in the area of HVAC equipment first cost, ongoing energy cost reduction, and clean room garment cost saving, were identified and dollar values for the specific facilities under consideration assigned. Additional factors such as facility modification flexibility due to tool isolation, process isolation permitting varied temperature/humidity conditions to be maintained, simplified process tool electrical/piping design and routing, and increased operator safety were identified without assigning dollar values for savings.