栅极- s /D重叠、不对称和独立栅极特性对减小纳米级DGMOSFET短沟道效应的影响

R. Vaddi, S. Dasgupta, R. P. Agarwal
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引用次数: 4

摘要

近年来,人们对dgmosfet的非对称和独立栅极特性进行了深入的研究。本文研究了基于dgmosfet的独立栅极、跨接栅极s /D和非对称(前后栅极氧化物厚度、栅极功函数和栅极偏置)特性的短沟道效应最小化。提出了具有非对称、独立栅极特性的欠接DGMOSFET的阈值电压、阈值电压滚降和DIBL效应的新解析模型,并通过数值仿真结果进行了验证。总体而言,研究结果表明,通过适当调整后门偏置、后门氧化物厚度和栅极功函数材料,DGMOSFET的接下栅极特性和不对称性为DGMOSFET器件阈值电压的调整提供了更大的灵活性,并最大限度地减少了束缚栅极对称DGMOSFET所没有的ses。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Gate-S/D Underlap, Asymmetric and Independent Gate Features in the Minimization of Short Channel Effects in Nanoscale DGMOSFET
Asymmetric and independent gate features of DGMOSFETs are explored recently for nano scale applications. This paper investigates minimization of short channel effects based on the independent gate, gate-S/D under lap and asymmetric (in front and back gate oxide thickness, gate work functions and gate bias) features of DGMOSFETs. Novel analytical models for threshold voltage, threshold voltage roll-off and DIBL effects of an under lap DGMOSFET with asymmetric, independent gate features are proposed and validated with numerical simulation results. Overall, results show that gate under lap feature and asymmetry brought in DGMOSFET by proper tuning of back gate bias, back gate oxide thickness and gate work function materials add more flexibility for tuning of DGMOSFET device threshold voltage and minimizing SCEs which are not available in tied gate symmetric DGMOSFETs.
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