基于聚合物的射频MEMS开关的高效设计方法

Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004. Pub Date : 2004-09-08 DOI:10.1109/SMIC.2004.1398228

B. Ducarouge, D. Dubuc, S. Mellé, L. Bary, P. Pons, R. Plana

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引用次数: 11

摘要

我们提出了一种简单、快速、高效的电容并联开关拓扑设计方法。所提出的开关已经实现，测量结果表明，在22v的下拉电压下，24 GHz的隔离度优于-23 dB，损耗小于0.25 dB。为了设计和优化更复杂的无源电路，我们从电磁模拟中定义了一个可扩展的等效电模型，可以非常快速地优化微波性能。研究了与该结构的电迁移效应相关的射频功率能力，并证明了10w的最大功率处理。

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Efficient design methodology of polymer based RF MEMS switches

We present a capacitive shunt switch topology related to a simple, fast and efficient design methodology. The proposed switch has been realized and measurements exhibit isolation better than -23 dB and losses less than 0.25 dB at 24 GHz for a pull down voltage of 22 V. In order to design and optimize more complex passive circuits, we have defined a scalable equivalent electrical model from electromagnetic simulations that allows a very fast optimization of the microwave performance. The RF power capability related to the electromigration effect of this structure has been also investigated and a maximum power handling of 10 W has been demonstrated.

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来源期刊

Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004.

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