半导体工业中太赫兹光采样系统的开发与应用

2020 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT) Pub Date : 2020-09-01 DOI:10.1109/RFIT49453.2020.9226197

Eiji Kato, Y. Shang, M. Hashimoto

{"title":"半导体工业中太赫兹光采样系统的开发与应用","authors":"Eiji Kato, Y. Shang, M. Hashimoto","doi":"10.1109/RFIT49453.2020.9226197","DOIUrl":null,"url":null,"abstract":"This paper presents a terahertz (THz) optical sampling technique and discusses some industrial applications in semiconductor manufacturing and failure analysis. The use of ultrashort pulse fiber lasers and specific electro-optical or opto-electrical conversion devices such as photoconductive switches enable time-domain analysis of sub-picosecond pulses, paving the way to new industrial applications.","PeriodicalId":283714,"journal":{"name":"2020 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)","volume":"49 6","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Development and Application of Terahertz Optical Sampling Systems for the Semiconductor Industry\",\"authors\":\"Eiji Kato, Y. Shang, M. Hashimoto\",\"doi\":\"10.1109/RFIT49453.2020.9226197\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a terahertz (THz) optical sampling technique and discusses some industrial applications in semiconductor manufacturing and failure analysis. The use of ultrashort pulse fiber lasers and specific electro-optical or opto-electrical conversion devices such as photoconductive switches enable time-domain analysis of sub-picosecond pulses, paving the way to new industrial applications.\",\"PeriodicalId\":283714,\"journal\":{\"name\":\"2020 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)\",\"volume\":\"49 6\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RFIT49453.2020.9226197\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RFIT49453.2020.9226197","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文介绍了一种太赫兹(THz)光采样技术，并讨论了在半导体制造和失效分析中的一些工业应用。使用超短脉冲光纤激光器和特定的光电或光电转换设备，如光导开关，可以对亚皮秒脉冲进行时域分析，为新的工业应用铺平了道路。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development and Application of Terahertz Optical Sampling Systems for the Semiconductor Industry

This paper presents a terahertz (THz) optical sampling technique and discusses some industrial applications in semiconductor manufacturing and failure analysis. The use of ultrashort pulse fiber lasers and specific electro-optical or opto-electrical conversion devices such as photoconductive switches enable time-domain analysis of sub-picosecond pulses, paving the way to new industrial applications.

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来源期刊

2020 IEEE International Symposium on Radio-Frequency Integration Technology (RFIT)

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