N. Swart, S. Bart, M. Zaman, M. Mariappan, J. Gilbert, D. Murphy
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AutoMM: automatic generation of dynamic macromodels for MEMS devices
We report on the development of a new CAD tool, AutoMM, which supports the automatic generation of dynamic macromodels for a broad class of MEMS devices. The tool is demonstrated by producing a 2 DOF macromodel of the Analog Devices ADXL76 airbag accelerometer. Considerably improved functionality is obtained over earlier models of the device, including prediction of cross-axis response. Excellent agreement is obtained between simulations and measured data.
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