Adaptive displacement tracking control of piezo-actuated manipulation mechanisms with hysteresis and disturbance

In this paper, we introduce an adaptive control methodology of piezoelectric actuators for microelectromechanical manipulation mechanisms. The adaptive control strategy capitalizes on the piezoelectric actuator's inverse model to design an adaptive controller using a Lyapunov-based adaptation technique. The controller achieves high precision motion tracking under hysteresis nonlinearities, parametric uncertainties, and external disturbance. Results for different situations highlight the performance of the proposed controller in compensating for hysteresis effect.