在高温压力传感器中使用的langasite型晶体中铝有效替代镓

H. Takeda, S. Tanaka, S. Izukawa, H. Shimizu, T. Nishida, T. Shiosaki
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引用次数: 38

摘要

采用Czochralski法成功生长了La3Ga5-xAlxSiO14 (LGS)型晶体La3Ga5-xAlxSiO14 (LGAS(x))和la3ta0.5 - ga5.5 - xalxsio14 (LTGA(x))。这些晶体的直径为18-23毫米,长度为70-100毫米。LGAS(x=0.9)和LTGA(x=0.5)晶体的压电模量d11值分别为6.21和6.92 pC/N,略大于纯LGS和La3Ta0.5Ga5.5O14 (LTG)晶体的压电模量d11值(6.08和6.89 pC/N)。LTGA(x=0.5)晶体对d11的温度依赖性最低。al取代晶体在400℃时的电阻率ρ值明显高于在含氧气氛中生长的纯LGS和LTG晶体。铝代入能有效改善LGS和LTG的电学性能,LTGA(x=0.5)晶体适合作为燃烧压力传感器材料。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effective substitution of aluminum for gallium in langasite-type crystals for a pressure sensor use at high temperature
Aluminum-substituted La3Ga5SiO14 (LGS)-type crystals, La3Ga5-xAlxSiO14 (LGAS(x)) and La3Ta0.5Ga5.5-xAlxSiO14 (LTGA(x)), were successfully grown by the Czochralski technique. These crystals were 18-23 mm in diameter and 70-100 mm in length. The piezoelectric modulus d11 values (6.21 and 6.92 pC/N) of the LGAS(x=0.9) and LTGA(x=0.5) crystals were slightly larger than that of the pure LGS and La3Ta0.5Ga5.5O14 (LTG) ones (6.08 and 6.89 pC/N), respectively. The LTGA(x=0.5) crystals showed the lowest temperature dependence of d11. The electric resistivity ρ values of the Al-substituted crystals at 400 o C were significantly higher than those of the pure LGS and LTG crystals grown in an oxygen-containing atmosphere. The aluminum substitution is effective for improving the electrical properties of the LGS and LTG, and the LTGA(x=0.5) crystals are suitable for combustion pressure sensor materials.
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