用于x射线天文学的MEMS x射线光学系统的仿真设计

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607859

M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda

{"title":"用于x射线天文学的MEMS x射线光学系统的仿真设计","authors":"M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda","doi":"10.1109/OMEMS.2008.4607859","DOIUrl":null,"url":null,"abstract":"An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Simulation-based design of a MEMS X-ray optic for X-ray astronomy\",\"authors\":\"M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda\",\"doi\":\"10.1109/OMEMS.2008.4607859\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.\",\"PeriodicalId\":402931,\"journal\":{\"name\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2008.4607859\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607859","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

利用MEMS技术设计了一种用于x射线天文学的超轻x射线光学器件。采用数值模拟方法对允许加工精度进行估算。所获得的x射线图像与设计一致。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Simulation-based design of a MEMS X-ray optic for X-ray astronomy

An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

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来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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