用于x射线天文学的MEMS x射线光学系统的仿真设计

M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda
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引用次数: 0

摘要

利用MEMS技术设计了一种用于x射线天文学的超轻x射线光学器件。采用数值模拟方法对允许加工精度进行估算。所获得的x射线图像与设计一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simulation-based design of a MEMS X-ray optic for X-ray astronomy
An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.
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