多材料按需喷射液滴系统设计与实验研究

Xiayun Shu, Dan Xie, Xue-feng Chang, Jian Wang, An Xie, Liang Yang
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引用次数: 6

摘要

为满足微电子工业日益增长的多材料点胶需求,本文设计了一种多点胶模块按需点胶机。所述点胶模块包括用于熔融金属的气动膜片式液滴发生器、用于低粘度流体的压电式活塞式液滴发生器和用于高粘度流体的机械式阀式液滴发生器。建立了基于数字和模拟摄像机的图像采集系统,用于液滴产生过程的视觉引导和图像采集。利用运动卡和PC(个人计算机)组成的三维工作台和旋转工作台组成定位系统,实现液滴喷射的精确定位。所提出的结构的这种数据驱动性质大大提高了系统的灵活性,用户可以动态配置微电子制造和组装所需的材料。对熔融金属、去离子水和甘油溶液的混合物以及环氧树脂的印刷机进行了实验研究。本研究的结果表明,所开发的多模块按需滴注系统可以实现灵活友好的用户界面,同时使用各种类型的滴注发生器来点注各种功能材料。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design and experimental study on droplet-on-demand jetting system for multi-materials
To satisfy the increasing demand for multi-material dispensing in microelectronics industry, this paper presents a multi-dispensing-module droplet-on-demand printing machine. The dispensing- module consist a pneumatic diaphragm droplet generator for molten metal, a piezoelectric piston droplet generator for low viscosity fluid and a mechanical valve droplet generator for high viscosity fluid. Image acquisition system with digital and analog camera for the visual guiding and droplet producing process image collection are established. A three dimensional stage and a rotary stage with motion card and PC (personal computer) forms the positioning system to realize the accurate position of droplet jetting. This data-driven nature of proposed structure greatly improves the system flexibility with which the user can dynamically configure the desired materials for microelectronics manufacturing and assembling. Experimental study on the printing machine for molten metal, mixture of DI water and glycerin solution, and epoxy resin was carried out. The result of the present work implied that the developed multi-dispensing-module droplet-on-demand system can achieve a flexible and friendly user interface, while dispensing a wide range of functional materials using various types of droplet generators.
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