交变电场作用下微细花纹结构中微气泡的去除

Lithography Asia Pub Date : 2009-12-03 DOI:10.1117/12.841227
H. Sasazaki, A. Kawai
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引用次数: 1

摘要

在水/甲醇混合溶液中,不同尺寸的凹方形图案用于微气泡的粘附和去除研究。随着溶液表面能的降低,微气泡更容易从方形图案中移除。然而,随着图案的平方尺寸的减小,微气泡不太可能被去除。可以确定去除气泡的水/甲醇溶液的阈浓度。基于表面能分析,可以解释微气泡的附着和去除机理。通过对一个孤立的气泡施加交变电场,水在电极表面发生电分解。讨论了微气泡去除控制的可能性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro bubble removal from micro pattern structure under alternating electric field
Various sizes of concave square patterns are used for micro bubble adhesion and removal investigation in a water/methanol mixture solution. As decreasing the surface energy of the solution, the micro bubble is more likely to remove from the square patterns. However, the micro bubble is less likely to remove as decreasing the square size of patterns. The threshold concentration of water/methanol solution for bubble removal can be determined. Based on the surface energy analysis, the adhesion and removal mechanisms of micro bubble can be explained. By applying alternating electric field to an isolated bubble, electric decomposition of water occurred at the electrode surface. The possibility of removal control of micro bubble is discussed.
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