氢等离子体处理用于硅波导平滑

8th IEEE International Conference on Group IV Photonics Pub Date : 2011-11-01 DOI:10.1109/GROUP4.2011.6053727

Jingnan Cai, Yu Wang, Y. Ishikawa, Y. Yamashita, Y. Kamiura, K. Wada

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引用次数: 1

摘要

我们证明了在硅环谐振器上进行远程氢等离子体处理可以在低于100°C的温度下使硅波导光滑。这也提供了一种很有前途的方法来为设计的加/降波长修剪谐振器。

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Hydrogen plasma treatment for Si waveguide smoothing

We demonstrated that remote hydrogen plasma treatment on silicon ring resonators can smooth the Si waveguides at lower than 100 °C. This also provides a promising way to trim resonators for a designed add/drop wavelength.

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8th IEEE International Conference on Group IV Photonics

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