T. Uruma, T. Tabei, S. Yokoyama, Y. Amemiya, Tadashi Sato, S. Yamada, K. Okada
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Hybrid Integration of Photonic Devices and CMOS Amplifiers
A new integration technology of optical waveguides and photodiodes using evanescent light is proposed and we have succeeded in amplification of the photodiode signal with the CMOS operational amplifiers in the same Si substrate.