{"title":"考虑阱能级能量分布的基于热离子场发射机制的压印模型","authors":"M. Tajiri, H. Nozawa","doi":"10.1109/IPFA.2001.941493","DOIUrl":null,"url":null,"abstract":"In recent years, nonvolatile memories with use of new materials have attracted considerable attention. In particular, ferroelectric RAMs (FeRAMs) (Scott and Araujo, 1989) were realized recently and are expected to take the place of DRAMs and other ROMs. The ferroelectric material used for FeRAMs has perovskite crystal structure with bistable states, each of which corresponds to logic states, \"0\" and \"1\". However, to use FeRAMs as main memories of computers, we have to overcome a few reliability issues: (a) retention, a decrease in polarization charge after long-term storage (Gruveman and Tanaka, 2000; Nakao et al, 1998), and relaxation, the decrease in polarization charge immediately after applying voltage; (b) imprint, the shift in specific polarized direction in the hysteresis curve (Hase et al, 1998; Nagasawa and Nozawa, 1999; Al-Sharif et al, 1996; Lee and Ramesh, 1995); (c) fatigue, the decrease in polarizability by repeat writing (Mihara et al, 1994; Lee et al, 2000). SBT thin films are currently investigated because of their high fatigue endurance. However, there are other issues, such as imprint. In this paper, we investigated the characteristics of imprint in SrBi/sub 2/Ta/sub 2/O/sub 9/ (SBT) and Pb(Zr,Ti)O/sub 3/ (PZT) thin films.","PeriodicalId":297053,"journal":{"name":"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)","volume":"90 12","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Imprint model based on thermionic field emission mechanism considering energy distribution of trap levels\",\"authors\":\"M. Tajiri, H. Nozawa\",\"doi\":\"10.1109/IPFA.2001.941493\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In recent years, nonvolatile memories with use of new materials have attracted considerable attention. In particular, ferroelectric RAMs (FeRAMs) (Scott and Araujo, 1989) were realized recently and are expected to take the place of DRAMs and other ROMs. The ferroelectric material used for FeRAMs has perovskite crystal structure with bistable states, each of which corresponds to logic states, \\\"0\\\" and \\\"1\\\". However, to use FeRAMs as main memories of computers, we have to overcome a few reliability issues: (a) retention, a decrease in polarization charge after long-term storage (Gruveman and Tanaka, 2000; Nakao et al, 1998), and relaxation, the decrease in polarization charge immediately after applying voltage; (b) imprint, the shift in specific polarized direction in the hysteresis curve (Hase et al, 1998; Nagasawa and Nozawa, 1999; Al-Sharif et al, 1996; Lee and Ramesh, 1995); (c) fatigue, the decrease in polarizability by repeat writing (Mihara et al, 1994; Lee et al, 2000). SBT thin films are currently investigated because of their high fatigue endurance. However, there are other issues, such as imprint. In this paper, we investigated the characteristics of imprint in SrBi/sub 2/Ta/sub 2/O/sub 9/ (SBT) and Pb(Zr,Ti)O/sub 3/ (PZT) thin films.\",\"PeriodicalId\":297053,\"journal\":{\"name\":\"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)\",\"volume\":\"90 12\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA.2001.941493\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2001.941493","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
摘要
近年来,使用新材料的非易失性存储器引起了人们的广泛关注。特别是,铁电ram (FeRAMs) (Scott和Araujo, 1989)是最近才实现的,有望取代dram和其他rom。用于feram的铁电材料具有具有双稳态的钙钛矿晶体结构,每个双稳态对应于逻辑态“0”和“1”。然而,要使用feram作为计算机的主存储器,我们必须克服几个可靠性问题:(a)保留,长期存储后极化电荷的减少(Gruveman和Tanaka, 2000;Nakao et al, 1998),弛豫,施加电压后立即极化电荷的减少;(b)印记,迟滞曲线中特定极化方向的偏移(Hase et al, 1998;Nagasawa and Nozawa, 1999;al - sharif等人,1996;Lee and Ramesh, 1995);(c)疲劳,重复书写导致极化性降低(Mihara et al ., 1994;Lee et al ., 2000)。SBT薄膜由于具有较高的疲劳耐久性而受到广泛的研究。然而,还有其他问题,如印记。本文研究了SrBi/sub 2/Ta/sub 2/O/sub 9/ (SBT)薄膜和Pb(Zr,Ti)O/sub 3/ (PZT)薄膜的压印特性。
Imprint model based on thermionic field emission mechanism considering energy distribution of trap levels
In recent years, nonvolatile memories with use of new materials have attracted considerable attention. In particular, ferroelectric RAMs (FeRAMs) (Scott and Araujo, 1989) were realized recently and are expected to take the place of DRAMs and other ROMs. The ferroelectric material used for FeRAMs has perovskite crystal structure with bistable states, each of which corresponds to logic states, "0" and "1". However, to use FeRAMs as main memories of computers, we have to overcome a few reliability issues: (a) retention, a decrease in polarization charge after long-term storage (Gruveman and Tanaka, 2000; Nakao et al, 1998), and relaxation, the decrease in polarization charge immediately after applying voltage; (b) imprint, the shift in specific polarized direction in the hysteresis curve (Hase et al, 1998; Nagasawa and Nozawa, 1999; Al-Sharif et al, 1996; Lee and Ramesh, 1995); (c) fatigue, the decrease in polarizability by repeat writing (Mihara et al, 1994; Lee et al, 2000). SBT thin films are currently investigated because of their high fatigue endurance. However, there are other issues, such as imprint. In this paper, we investigated the characteristics of imprint in SrBi/sub 2/Ta/sub 2/O/sub 9/ (SBT) and Pb(Zr,Ti)O/sub 3/ (PZT) thin films.