Triple trench gate IGBTs

In this work, we propose an insulated gate bipolar transistor (IGBT) with a novel lateral triple trench gate architecture, which shows a four times higher forward conduction current compared to devices with a lateral gate or single trench gate structure. For the proof of concept, we realized single trench gate IGBTs using the reduced surface field (RESURF) principle [J.A. Appels, H.M.J. Vaes, A.W. Ludikhuize] for 600V net applications. Typical applications for those integrated smart power systems are, for example, power management of compact fluorescent lamps (CFL) or solid state relays. Further improvement of the forward conduction mode by using triple trench gate structures was studied