Design and simulation of a novel micromachined comb-gimbal gyroscope

A novel micromachined comb-gimbal gyroscope is presented, which will be excited by electrostatic forces and the coriolis acceleration induced torsion motion will be read out capacitively. Since electrostatic comb driving and DRIE (deep reactive ion etching) technology are adopted, large driving amplitude can be achieved and sensitivity of gyroscope can be increased. Based on the modal analysis of the gyroscope by FEM method, the structure dimensions are optimized according to resonant frequency matching of the driving mode and detection mode. The fabrication sequences of the gyroscope are discussed in detail.