在砷化镓晶圆厂设施中调节晶圆释放的工作量

J.W. Lawton, A. Drake, R. Henderson, L.M. Wein, R. Whitney, D. Zuanich
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引用次数: 23

摘要

描述了为MWTD(惠普微波技术部门)GaAs制造工厂开发的工作量调节晶圆释放策略。使用离散事件模拟器ManSim来确定其相对于其他晶圆释放策略的改进,结果表明,它有可能将制造周期时间缩短约50%。有人认为,该工厂历来专注于前沿工艺技术,而不是更传统的制造绩效衡量标准,这推迟了对这类政策潜力的认识。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Workload regulating wafer release in a GaAs fab facility
The workload regulating wafer release policy, that was developed for MWTD's (Hewlett-Packard's Microwave Technology Division) GaAs fabrication facility is described. A discrete-event simulator, ManSim was used to determine its improvements over other wafer release policies, and it was shown that it has the potential to reduce fabrication cycle time by roughly 50%. It is suggested that the plant's historical focus on leading-edge process technology rather than on more traditional measures of manufacturing performance has delayed the recognition of the potential of a policy of this type.<>
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