2.1D封装用有机衬底翘曲分析

S. Kohara, K. Okamoto, H. Noma, K. Toriyama, H. Mori
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引用次数: 3

摘要

2.1D封装是2.5D封装的潜在低成本替代品。在2.1D封装中,没有使用硅/玻璃中间层,而是在衬底的芯片一侧使用高密度布线层作为中间层。2.1D封装面临的挑战之一是有机基板由于其高度不对称的结构而产生的热变形。本文采用有限元法对2.1D基板的热翘曲进行了分析。分析是在3-2-3构建层结构上完成的,在芯片安装侧具有高密度布线层,因为它具有作为多芯片封装产品的潜在应用。分析表明,对于尺寸为47.5mm×47.5mm的衬底,测试衬底的翘曲量为250μm。调整后堆积层的Cu加载比,只减少了17%的翘曲量。我们提出了一种结构,其中电路层和绝缘通孔层增加到衬底的背面,以减少翘曲。所述电路层的厚度设置等于所述高密度电路层的总厚度。通孔层的厚度也设为等于高密度布线层之间绝缘层的总厚度。然而,我们发现调整电路层的最佳Cu负载比高密度布线层的平均Cu负载比低20 - 40%。分析表明,所提出的衬底结构显著减少了翘曲。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Warpage analysis of organic substrates for 2.1D packaging
2.1D packaging is a potential low cost alternative to 2.5D packaging. Instead of using silicon/glass interposers, in 2.1D package, a high-density wiring layer is on the chip side of the substrate acting as an interposer. One of the challenges for 2.1D packaging is the thermal deformation of organic substrates due to their highly asymmetric structure. In this report, we analyzed the thermal warpage of 2.1D substrates by finite element method. The analyses are done on a 3-2-3 build-up layer structure with high-density wiring layers on the chip mounting side, since it has potential applications as multi-chip package products. The analysis showed that the warpage of the test substrate is 250μm for the substrate of 47.5mm×47.5mm in size. The adjustment of the Cu loading ratio of the back build-up layers only reduces the warpage by 17%. We propose a structure in which a circuitry layer and an insulating via layer are added to the back side of the substrate for the warpage reduction. The thickness of the circuitry layer is set equal to the total thickness of the high density circuitry layers. The thickness of via layer is also set equal to the total thickness of the insulating layers between the high-density wiring layers. However we found that the optimum Cu loading ratio for the adjustment circuitry layer is lower than the average Cu loading ratio for the high-density wiring layers by 20 to 40 %. The analysis showed that the proposed substrate structure reduces the warpage significantly.
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