掺杂铟或铝的硅光电探测器的光电特性

W. F. Mohammed, M. Al-Tikriti, Mudhar A. Humoody
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摘要

本文对实验室制备的掺杂铟或铝的硅光电探测器的光电性能进行了测量和讨论。分析了扩散温度、扩散时间、掺杂和反向电压对光电性能的影响。结果表明,在1050℃扩散温度和30 min扩散时间下,该PN器件具有良好的整流性能。I-V特性曲线显示,掺杂150 nm铟和200 nm铝的样品具有较好的低漏电流电子性能,理想因数分别为1.7和1.87。光生电流在波长0.85 μm处达到最大值,在波长1.1 μm处仍有35%以上的最大值。模拟结果与实验测量结果的对比表明,光电流随波长的分布在形状上几乎相同。此外,峰值电流的位置几乎出现在相同的波长。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optoelectronic properties of silicon photodetector doped with indium or aluminum
In this research paper, the photoelectronic properties of laboratory fabricated silicon photodetector doped with indium or aluminum are measured and discussed. The effects of diffusion temperature, diffusion time, doping and reverse voltages on the photoelectronic properties are analyzed. It was found that the PN devices exhibit very good rectification properties at 1050 °C diffusion temperature and 30 minutes diffusion time. I-V characteristic curves showed that samples doped with 150 nm indium and 200 nm of aluminum exhibit better electronic properties of low leakage current with ideality factors equal to 1.7 and 1.87 respectively. Photogenerated current exhibits maximum value at 0.85 μm and it still has more than 35% of its maximum values at 1.1 μm wavelength. The correlation of the simulated and the experimentally measured results show that the profile of photogenerated current with the wavelength is almost identical in shape. Furthermore the position of the peak currents occurs nearly at the same wavelength.
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