用于制造新型微结构的硅的激光加工

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148925

M. Alavi, S. Buttgenbach, A. Schumacher, H. Wagner

{"title":"用于制造新型微结构的硅的激光加工","authors":"M. Alavi, S. Buttgenbach, A. Schumacher, H. Wagner","doi":"10.1109/SENSOR.1991.148925","DOIUrl":null,"url":null,"abstract":"A method for fabrication of new types of microstructures with high aspect ratio is described. This technique is based on the local destruction of limiting","PeriodicalId":273871,"journal":{"name":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","volume":"126 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"20","resultStr":"{\"title\":\"Laser machining of silicon for fabrication of new microstructures\",\"authors\":\"M. Alavi, S. Buttgenbach, A. Schumacher, H. Wagner\",\"doi\":\"10.1109/SENSOR.1991.148925\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A method for fabrication of new types of microstructures with high aspect ratio is described. This technique is based on the local destruction of limiting\",\"PeriodicalId\":273871,\"journal\":{\"name\":\"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers\",\"volume\":\"126 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-06-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"20\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSOR.1991.148925\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.1991.148925","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 20

摘要

介绍了一种新型高纵横比微结构的制备方法。这种技术是基于局部破坏的极限

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Laser machining of silicon for fabrication of new microstructures

A method for fabrication of new types of microstructures with high aspect ratio is described. This technique is based on the local destruction of limiting

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来源期刊

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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