采用压电悬臂梁的尖端扫描动态SFM进行全晶圆检测

Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference Pub Date : 1999-07-06 DOI:10.1109/IMNC.1999.797528

J. Chu, R. Maeda, T. Itoh, T. Suga

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引用次数: 1

摘要

动态扫描力显微镜(DSFM)已被证明是一种多用途的科学技术仪器。它使测量从单个原子到几微米大小的表面结构成为可能。但在实际应用中，被检测的样品往往太大，无法适应传统SFM系统的SFM样本阶段。在本报告中，我们提出了一种新的DSFM结构，兼容全晶圆检测。

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Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection

The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.

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Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference

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