双极性载流子注入不同隧道氧化层厚度的金纳米晶非易失性存储器

Yu-Hua Liu, C. Liao, Chih-Ting Lin, J. Wang
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引用次数: 0

摘要

研究了不同隧道氧化层厚度金纳米晶(Au-NC)记忆体的双极性载流子注入和电荷保留现象。对于薄TO (~ 3nm)样品,电子以正栅偏压从衬底注入。随着TO厚度的增加,浇口注入的孔洞越来越明显。与厚TO样品中的栅极注入空穴相比,薄TO样品中的衬底注入电子表现出更高的电荷损失。电荷保持能力差的原因可以归结为漏电流通过薄to的直接隧穿。此外,与空穴相比,带电子的Au-NC存储器表现出更低的电荷损失活化能,这是由于Au-NC存储器的电子势垒高度较低。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ambipolar carrier injection of gold nanocrystal nonvolatile memory with different tunneling oxide thickness
Ambipolar carrier injection and charge retention phenomenon of gold-nanocrystal (Au-NC) memories with different tunneling oxide (TO) thickness were investigated. For the samples with thin TO (~3 nm), the electrons were injected from the substrate at positive gate bias. With the increase of TO thickness, the holes injected from the gate became more significant. Compared with the gate injected holes in the sample with thick TO, the substrate injected electrons in the sample with thin TO show a higher charge loss. The poor charge retention can be ascribed to the direct tunneling leakage current through the thin TO. Further, the Au-NC memories with electrons exhibit lower activation energy of charge loss than that with holes, which is due to the lower electron barrier height of the Au-NC memory.
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