氮气鼓泡除氧系统的研制

International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM Pub Date : 1994-06-21 DOI:10.1109/ISSM.1994.729456

Y. Ishihara, S. Yamane, H. Yamazaki, H. Tsuge

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引用次数: 0

摘要

去除超纯水中的溶解氧(DO)对于未来的超大规模集成(ULSI)至关重要。我们发现了氧通过材料扩散增加DO浓度的大驱动力的存在。基于这一发现，我们开发了由低氧渗透材料制成的DO去除系统，并将氮气鼓泡作为使用净化器。在该系统中，残余DO浓度达到0.2 ppb，气液比为1.2 m3/m3，比之前报道的数据小10倍。此外，超纯水中的其他杂质在此过程后不会增加。

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Development Of Dissolved Oxygen Removal System Using Nitrogen Gas Bubbling

It is essentially important to remove the dissolved oxygen (DO) in the ultrapure water for the future ultra-large scale integration (ULSI). We have found the existence of the big driving force for the oxygen diffusion through the material that increases the DO concentration. Based on this finding, we have developed the DO removal system made of a low oxygen permeability material with the nitrogen gas bubbling as a point of use purifier. In this system, the residual DO concentration has reached 0.2 ppb at a gas-liquid ratio of 1.2 m3/m3 that is ten times smaller than the previously reported data. Furthermore, the other impurities in the ultrapure water do not increase after this process.

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International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM

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