Ag-SiO/sub - 2/纳米复合层的电子场发射性能

2005 International Vacuum Nanoelectronics Conference Pub Date : 2005-07-10 DOI:10.1109/IVNC.2005.1619558

W. Tsang, V. Stolojan, C. Giusca, C. Poa, B. Sealy, S. Silva, S. Wong

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摘要

本文研究了在热氧化SiO/sub - 2/层上通过Ag/sup +/注入将纳米Ag团簇引入SiO/sub - 2/基体的方法。嵌入的银纳米团簇为发射电子从衬底到发射表面创造了导电路径，并且由于电非均匀性效应而产生局部电场增强。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The electron field emission properties of Ag-SiO/sub 2/ nanocomposite layers

This paper investigates the introduction of nano-sized Ag cluster into a SiO/sub 2/ matrix by Ag/sup +/ implantation on thermally oxidised SiO/sub 2/ layers. The embedded Ag nanoclusters create conducting paths for the emissive electrons from substrate to emission surface and give rise to a local electric field enhancement due to an electrical inhomogeneity effect.

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2005 International Vacuum Nanoelectronics Conference

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