S. Khumpuang, Hiroyuki Tanaka, N. Umeyama, S. Hara
{"title":"用萃取工具在最小晶圆厂制造定制微针阵列的工艺成本和时间","authors":"S. Khumpuang, Hiroyuki Tanaka, N. Umeyama, S. Hara","doi":"10.1109/EDTM.2018.8421429","DOIUrl":null,"url":null,"abstract":"This work presents, for the first time, the study of fabrication time together with running cost of a microneedle array fabricated using minimal fab. A Si hollow-microneedle array was fabricated on a half inch wafer within 7 hours and its process cost was less than $10/chip although the process was only one chip production. A portable and disposable dropper is simply produced and assembled with microneedle array for the application of liquid extraction that may extend to be used as a blood extraction tool. The extracted liquid by one finger-push and release, up to 0.8 ml of liquid can be drawn and store in the dropper.","PeriodicalId":418495,"journal":{"name":"2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Process Cost and Time in Minimal Fab to Fabricate Custom-made Microneedle Array with Extraction Tool\",\"authors\":\"S. Khumpuang, Hiroyuki Tanaka, N. Umeyama, S. Hara\",\"doi\":\"10.1109/EDTM.2018.8421429\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presents, for the first time, the study of fabrication time together with running cost of a microneedle array fabricated using minimal fab. A Si hollow-microneedle array was fabricated on a half inch wafer within 7 hours and its process cost was less than $10/chip although the process was only one chip production. A portable and disposable dropper is simply produced and assembled with microneedle array for the application of liquid extraction that may extend to be used as a blood extraction tool. The extracted liquid by one finger-push and release, up to 0.8 ml of liquid can be drawn and store in the dropper.\",\"PeriodicalId\":418495,\"journal\":{\"name\":\"2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM)\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EDTM.2018.8421429\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE 2nd Electron Devices Technology and Manufacturing Conference (EDTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDTM.2018.8421429","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Process Cost and Time in Minimal Fab to Fabricate Custom-made Microneedle Array with Extraction Tool
This work presents, for the first time, the study of fabrication time together with running cost of a microneedle array fabricated using minimal fab. A Si hollow-microneedle array was fabricated on a half inch wafer within 7 hours and its process cost was less than $10/chip although the process was only one chip production. A portable and disposable dropper is simply produced and assembled with microneedle array for the application of liquid extraction that may extend to be used as a blood extraction tool. The extracted liquid by one finger-push and release, up to 0.8 ml of liquid can be drawn and store in the dropper.