光学级合成石英的生长与表征

C. Suzuki, M.S. Tanaka, A. H. Shinohara
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引用次数: 3

摘要

一种将种子和生长z区从商业高压灭菌器中循环的微颗粒通量中定位的方法已被用于生长光学级合成石英。根据棒材的不同,固体夹杂物的数量在0.02-0.03个颗粒/cm/sup /之间。(0003)反射的x射线形貌对比显示,与种子相比,z区晶格间距(应变)要小得多。位错线总体上是由种子蚀刻通道产生的,这意味着使用质量较好的种子可以消除位错线。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth and characterization of optical grade synthetic quartz
A method to position the seed and Z-region of growth out of the circulating micro-particle flux in commercial autoclave has been used to grow optical grade synthetic quartz. The number of solid inclusions is in the range of 0.02-0.03 particles/cm/sup 3/, depending on the bar. The observation of X-ray topographic contrast of (0003) reflection shows a much smaller Z-region lattice spacing (strain) in comparison with the seed. The dislocation lines are in their totality originated by the seed etch-channels, that means, they can be eliminated by using a better quality seed.
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