Scalable Inductor Model on Lossy Substrates with Accurate Eddy Current Simulation

The model developed in this work is especially designed for epi-layer substrates with highly conductive bulk-substrates of typically 0.01Ωcm. Eddy currents play a major role and their effects are therefore accurately modeled. This is done by simulating the current distribution in the substrate and then fitting monomial equations to the results. The resulting model is scalable and does not need any fitting to measurements. The circuit describing the model is compact, which makes it easy to implement it in standard design tools. Excellent agreement to measurements is found for a wide range of inductors.