功率集成电路和微机电系统的进展,“模拟”技术接口的现实世界

C. Contiero, B. Murari, B. Vigna
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引用次数: 21

摘要

集成电路技术的巨大进步导致了可实现的数字计算能力的巨大增长,而没有伴随着与“模拟”而非数字的现实世界接口能力的并行发展。这种能力是许多产品的基础,代表了它们发展的驱动力。像双极CMOS- dmos (BCD)这样的技术,多年来一直用于实现功率ic,似乎比纯CMOS更适合扮演构建模拟接口的角色。模拟接口的新兴前沿以微机电系统(MEMS)为代表,其中微电子多年来开发的制造技术正应用于微加工硅,创造了结合电气,机械,流体和光学元件的新解决方案。本文综述了BCD技术的发展趋势和MEMS器件的新应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Progress in power ICs and MEMS, "analog" technologies to interface the real world
The dramatic progress in integrated circuit technology has led to a huge increase of achievable digital computing power not accompanied by a parallel evolution in the capability to interface to the real world which is "analog" and not digital. This capability is fundamental in many products and represents the driving force in their evolution. Technologies like bipolar-CMOS-DMOS (BCD), available for many years to realize power ICs, appear to be more suitable than the pure CMOS to play the role of building analog interfaces. An emerging frontier of analog interfaces is represented by micro electro mechanical systems (MEMS) where the manufacturing technology developed in many years of microelectronics is being applied to micro-machined silicon, creating new solutions that combine electrical, mechanical, fluidic and optical elements. In this paper, an overview of BCD technology trends and of new applications of MEMS devices is examined.
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