计量扫描探针显微镜

1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254) Pub Date : 1998-07-06 DOI:10.1109/CPEM.1998.699768

Cao Shizhi, Xu Yi, Z. Kegong, C. Harms, L. Koenders

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引用次数: 5

摘要

由NIM(中国)和PTB(德国)联合研制的计量扫描探针显微镜(SPM)。该仪器是一个“样品扫描”SPM。一种新型的高精度扫描X-Y工作台(单片柔性铰链型)，所有6个轴都配有电容换能器，并由相应的数字信号控制，由铝制成。z型扫描仪使用内置电容传感器作为其有源元件。X-Y扫描在一个封闭的反馈回路中产生。该SPM在z -扫描仪中包括两个尖端支架，一个用于隧道尖端，另一个用于针传感器。这种结构对于不同类型的STM和AFM测量非常方便。仪器的测量由带有DSP卡和IEEE卡的计算机控制。IEEE卡可以通过数字信号驱动X-Y扫描表。本系统的软件采用C语言和IDL语言编写。用C语言编写了DSP卡控制和数据采集程序。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A metrological scanning probe microscope

A metrological scanning probe microscope (SPM) has been jointly developed and manufactured by NIM (China) and PTB (Germany). This instrument is a "sample scan" SPM. A new and high precision scanning X-Y table (monolithic flecxible hinge type) equipped with capacitance transducers for all 6 axis and is controlled by a corresponding digital signal, and it is made of aluminum. The Z-scanner uses a built-in capacitance transducer for its active element. The X-Y scan is generated in a closed feedback-loop. This SPM includes a two tip holder in the Z-scanner, one is for tunnel-tip and the other is for needle sensor. This construction is very convenience for different types of measurement STM and AFM. The measurements of the instrument are controlled by a computer with a DSP card and a IEEE card. The IEEE card can drive the X-Y scanning table by a digital signal. The software of this system was written in C language and IDL language. The program for controling the DSP card and data collection was written in C language.

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来源期刊

1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254)

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