{"title":"六自由度粗细运动微型机器人","authors":"S. Kusunoki, A. Torii, K. Doki, A. Ueda","doi":"10.1109/MHS.2007.4420826","DOIUrl":null,"url":null,"abstract":"Displacement of a micro robot is described theoretically and experimentally. The structure of the robot is a Stewart-platform using six stacked-type piezoelectric actuators. The robot, which can realize a precise motion, is developed for a flexible conveying system, such as a desktop manufacturing system. The robot is used in a micro/nano system which requires a nanometer resolution. We describe the principle of the motion and demonstrate the self-propelled motion and the precise motion.","PeriodicalId":161669,"journal":{"name":"2007 International Symposium on Micro-NanoMechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Coarse and fine motion micro robot with six degrees of freedom\",\"authors\":\"S. Kusunoki, A. Torii, K. Doki, A. Ueda\",\"doi\":\"10.1109/MHS.2007.4420826\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Displacement of a micro robot is described theoretically and experimentally. The structure of the robot is a Stewart-platform using six stacked-type piezoelectric actuators. The robot, which can realize a precise motion, is developed for a flexible conveying system, such as a desktop manufacturing system. The robot is used in a micro/nano system which requires a nanometer resolution. We describe the principle of the motion and demonstrate the self-propelled motion and the precise motion.\",\"PeriodicalId\":161669,\"journal\":{\"name\":\"2007 International Symposium on Micro-NanoMechatronics and Human Science\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 International Symposium on Micro-NanoMechatronics and Human Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MHS.2007.4420826\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 International Symposium on Micro-NanoMechatronics and Human Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2007.4420826","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Coarse and fine motion micro robot with six degrees of freedom
Displacement of a micro robot is described theoretically and experimentally. The structure of the robot is a Stewart-platform using six stacked-type piezoelectric actuators. The robot, which can realize a precise motion, is developed for a flexible conveying system, such as a desktop manufacturing system. The robot is used in a micro/nano system which requires a nanometer resolution. We describe the principle of the motion and demonstrate the self-propelled motion and the precise motion.
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