超低插入损耗、10MHZ-10GHZ宽带的SAW单向数字间换能器

Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005. Pub Date : 2005-08-31 DOI:10.1109/FREQ.2005.1573997

Y. Satoh, K. Yamanouchi

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引用次数: 2

摘要

采用单向数字间换能器(UDT)的表面声波(SAW)滤波器具有低损耗特性。我们提出了一种单相单向换能器(UDT)，其最佳换能器效率的电极宽度约为/spl λ //4。在/spl λ //8位移的极薄介质光栅上通过IDT获得了udt。SiO/ sub2 /薄膜上电极的机电耦合(k/sup 2/)随着薄膜厚度的增加而迅速减小。因此，对于SiO/sub - 2/光栅的极薄厚度(2GHz时约为0.03/spl mu/m, Al的电极厚度为0.07/spl mu/m)， UDT获得了良好的性能。本文描述了在500MHz和2ghz范围内插入损耗低于1dB的宽带极低损耗滤波器的实验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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SAW unidirectional interdigital transducer with ultra-low insertion loss and wide band in 10MHZ-10GHZ range

Surface acoustic wave (SAW) filters employing unidirectional interdigital transducers (UDT) show low loss properties. We proposed a single phase unidirectional transducer (UDT) with about /spl lambda//4 electrode width of the best transducer efficiency. The UDTs are obtained by IDT on the very thin dielectric grating with /spl lambda//8 shifts. The electromechanical couplings (k/sup 2/) of electrodes on SiO/sub 2/ films decrease rapidly for film thickness. Therefore the good properties of UDT are obtained for the very thin thickness of SiO/sub 2/ grating (about 0.03/spl mu/m at 2GHz with electrode thickness of Al of 0.07/spl mu/m). In this paper we describe the experimental results of wide band and very low loss filters with below 1dB insertion loss at 500MHz and 2GHz-range.

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Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.

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