{"title":"Petri网在电容式微加速度计设计中的应用","authors":"R. Zaharyuk, V. Teslyuk, V. Karkulyovskyy","doi":"10.1109/MEMSTECH.2007.4283451","DOIUrl":null,"url":null,"abstract":"Proposes the use of Petri nets during computer-aided design of microaccelerometers on the system level and presents an example of using Petri nets for inter-digital microaccelerometers.","PeriodicalId":421462,"journal":{"name":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Using Petri Nets in Capacitive Microaccelerometers Design\",\"authors\":\"R. Zaharyuk, V. Teslyuk, V. Karkulyovskyy\",\"doi\":\"10.1109/MEMSTECH.2007.4283451\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Proposes the use of Petri nets during computer-aided design of microaccelerometers on the system level and presents an example of using Petri nets for inter-digital microaccelerometers.\",\"PeriodicalId\":421462,\"journal\":{\"name\":\"2007 International Conference on Perspective Technologies and Methods in MEMS Design\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-05-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 International Conference on Perspective Technologies and Methods in MEMS Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSTECH.2007.4283451\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 International Conference on Perspective Technologies and Methods in MEMS Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSTECH.2007.4283451","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Using Petri Nets in Capacitive Microaccelerometers Design
Proposes the use of Petri nets during computer-aided design of microaccelerometers on the system level and presents an example of using Petri nets for inter-digital microaccelerometers.