Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver

The article presents the results of designing, manufacturing, and studying the resonant properties of a square silicon membrane for use in a fiber-optic acoustic receiver. The dependences of resonant frequency on edge length (6-9 mm) and thickness of the membrane (30-50 μm) are obtained. The geometrical parameters of the membrane satisfying the values of resonant frequency (2-60 kHz), pressure (0.1-14 Pa), and deviation (10 nm) are determined: edge length is 8 mm and thickness is 40-50 μm (9.2-42.3 kHz). A series of square silicon membranes was fabricated by anisotropic wet etching. The amplitude-frequency characteristics of the membranes were experimentally measured using an adaptive holographic interferometer. For a square membrane of 8×8×0.044 m3, the experimentally measured resonant frequency was 10.1 kHz, which is consistent with the results of numerical simulation.