微流控通道与超高Q硅微盘谐振器的片上集成，用于芯片实验室传感应用

LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings Pub Date : 2007-11-12 DOI:10.1109/LEOS.2007.4382269

S. Yegnanarayanan, W. Roman, M. Soltani, G. Cremona, Hang Lu, A. Adibi

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引用次数: 8

摘要

本研究展示了基于芯片上集成这种硅基微盘谐振器(具有超高Q > 106)的传感平台的设计、制造和表征，该谐振器具有用于样品输送的微流体通道。本文报道了在上包层中使用流体调谐谐振特性以及在芯片实验室传感中的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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On-chip Integration of Microfluidic Channels with Ultra-high Q Silicon Microdisk Resonators for Lab-on-a-Chip Sensing Applications

This study demonstrates the design, fabrication, and characterization of a sensing platform based on the on-chip integration of such silicon-based microdisk resonators (with ultra high Q > 106) with microfluidic channels for sample delivery. Tuning of the resonance features using fluid in upper-cladding as well as applications in lab-on-a-chip sensing are reported.

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来源期刊

LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings

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