高度集成悬臂与发光二极管，通道波导，孔径，光电二极管扫描近场光学显微镜

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) Pub Date : 2000-07-11 DOI:10.1109/IMNC.2000.872666

M. Sasaki, K. Tanaka, K. Hane

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引用次数: 0

摘要

在这项研究中，描述了一种用于扫描近场光学显微镜(SNOM)的高度集成悬臂。SNOM系统所需的所有组件(用于光源的发光二极管(LED)、通道波导、纳米尺寸孔径尖端和光电二极管)都集成在悬臂上。

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Highly integrated cantilever with light emitting diode, channel waveguide, aperture, and photodiode for scanning near-field optical microscope

In this study, a highly integrated cantilever for a scanning near-field optical microscope (SNOM) is described. All components necessary for the SNOM system (light emitting diode (LED) for light source, channel waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.

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Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)

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