基于CMOS技术的高性能加速度计，具有低成本的附加组件

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906465

M. Brandl, V. Kempe

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引用次数: 14

摘要

奥地利Mikro Systeme国际公司为汽车传感器市场开发了一种高性能、带电容读出的单轴加速度计。全量程范围可定制从1g到200g。新颖的传感器概念结合了单片和混合概念的优势，并专注于成熟，高产量/低成本的批量制造工艺模块。该传感器概念的产业化和性能能力已得到验证。

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High performance accelerometer based on CMOS technologies with low cost add-ons

Austria Mikro Systeme International has developed a high performance, one axis accelerometer with capacitive readout for the automotive sensor market. The full-scale range is customizable from 1 g to 200 g. The novel sensor concept combines the advantages of monolithic and hybrid concepts and focuses on mature, high yield/low cost batch fabrication process modules. Industrialization and performance capabilities of the sensor concept have been demonstrated.

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来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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