低温下硅上的SiGe异质场效应管

F. Aniel, M. Enciso-Aguilar, N. Zerounian, L. Giguerre, P. Crozat, R. Adde, M. Zeuner, G. Hock, T. Hackbarth, H. Herzog, U. Konig
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引用次数: 7

摘要

良好的输运性能和带隙工程使得SiGe合金技术在微电子领域越来越重要。从中频和低噪声两个方面综述了SiGe异质场效应管在低温下的输运特性、性能和潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
SiGe hetero FETs on silicon at cryogenic temperature
Better transport properties and band gap engineering give a growing importance to SiGe alloy technologies in microelectronics. Transport properties, performances and potential of SiGe hetero FETs at cryogenic temperatures are reviewed focussing on IF and low noise.
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