H. Xiaodong, Lumiao, Hou Maohui, He Qingguo, Gao Cuizhuo, Bai Xiwei, Zhao Zhengping
{"title":"一个紧凑的串行射频MEMS开关s波段应用","authors":"H. Xiaodong, Lumiao, Hou Maohui, He Qingguo, Gao Cuizhuo, Bai Xiwei, Zhao Zhengping","doi":"10.1109/ICSICT.2001.981999","DOIUrl":null,"url":null,"abstract":"This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.","PeriodicalId":349087,"journal":{"name":"2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A compact serial RF MEMS switch for S-band application\",\"authors\":\"H. Xiaodong, Lumiao, Hou Maohui, He Qingguo, Gao Cuizhuo, Bai Xiwei, Zhao Zhengping\",\"doi\":\"10.1109/ICSICT.2001.981999\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.\",\"PeriodicalId\":349087,\"journal\":{\"name\":\"2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)\",\"volume\":\"59 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSICT.2001.981999\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT.2001.981999","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A compact serial RF MEMS switch for S-band application
This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.