复合影响铝的电化学氧化装置

2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Pub Date : 2010-09-09 DOI:10.1109/EDM.2010.5568808

N. Mukhurov, S. Krivonosov, I. Gasenkova, S. P. Zhvavy, E. V. Ostapenko

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引用次数: 0

摘要

研制了基于阳极氧化铝的微纳米结构形成装置，研究了超声场对氧化铝形成过程的稳定性、均匀性、生长速度等参数的影响。

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Device for electrochemical oxidation of aluminium with combined influence

The device has been developed for formation of micronanostructures based on anodic oxide aluminium allowing investigating the influence of ultrasound field on the stability, homogeneity, growth speed and other parameters of the formation processes of aluminium oxide.

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来源期刊

2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices

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