片上制造的游离氯传感器

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148845

A. van den Berg, M. Koudelka-Hep, B. van der Schoot, E. Verney-Norberg, P. Krebs, A. Grisel, N. D. de Rooij

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引用次数: 4

摘要

介绍了一种游离氯传感器的片上制造方法。传感器结构由平面三电极电化学电池组成，电池表面覆盖一层聚hema水凝胶膜。这种膜是在晶片上光刻的。为了保证膜与电极表面的良好粘附，在氧等离子体中进行了特殊的氧化处理，然后进行了硅化处理。检测游离氯的最佳工作极化电压为+50 mV vs. SCE。膜厚度为10和50 μ m的传感器在0.1和5 mg/1游离氯之间具有近似线性的校准曲线，灵敏度分别为2和0.4 nA/(mg/1)

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An on-wafer fabricated free-chlorine sensor

A method for on-wafer fabrication of free-chlorine sensors is described. The sensor structure consists of a planar three-electrode electrochemical cell covered with a polyHEMA hydrogel membrane. This membrane is photolithographically patterned on-wafer. In order to guarantee a good adhesion of the membrane to the electrode surface a special oxidation consisting of a treatment in an oxygen plasma has been developed followed by a silanization procedure. The optimal operational polarization voltage for detection of free chlorine was found to be +50 mV vs. SCE. Sensors with membrane thicknesses of 10 and 50 mu m were found to give approximately linear calibration curves between 0.1 and 5 mg/1 free chlorine, with sensitivities of 2 and 0.4 nA/(mg/1), respectively.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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