集成电路上光斑缺陷的激光注入

Proceedings First Asian Test Symposium (ATS `92) Pub Date : 1992-11-26 DOI:10.1109/ATS.1992.224415

R. Velazco, B. Martinet, G. Auvert

{"title":"集成电路上光斑缺陷的激光注入","authors":"R. Velazco, B. Martinet, G. Auvert","doi":"10.1109/ATS.1992.224415","DOIUrl":null,"url":null,"abstract":"Random spot defects may result in discrete faults such as line breaks and short circuits. Therefore they could contribute significantly to yield losses in stable fabrication lines of VLSI integrated circuits. The authors show how to use laser based equipment to inject such faults at the circuit level. Experimental results carried out on 32 bits microprocessors are presented and point out one of the main applications of this approach: the test sequence improvement.<<ETX>>","PeriodicalId":208029,"journal":{"name":"Proceedings First Asian Test Symposium (ATS `92)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-11-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Laser injection of spot defects on integrated circuits\",\"authors\":\"R. Velazco, B. Martinet, G. Auvert\",\"doi\":\"10.1109/ATS.1992.224415\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Random spot defects may result in discrete faults such as line breaks and short circuits. Therefore they could contribute significantly to yield losses in stable fabrication lines of VLSI integrated circuits. The authors show how to use laser based equipment to inject such faults at the circuit level. Experimental results carried out on 32 bits microprocessors are presented and point out one of the main applications of this approach: the test sequence improvement.<<ETX>>\",\"PeriodicalId\":208029,\"journal\":{\"name\":\"Proceedings First Asian Test Symposium (ATS `92)\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-11-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings First Asian Test Symposium (ATS `92)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ATS.1992.224415\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings First Asian Test Symposium (ATS `92)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ATS.1992.224415","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

随机点缺陷可能导致断线和短路等离散故障。因此，它们可能对VLSI集成电路稳定制造线的良率损失做出重大贡献。作者展示了如何使用基于激光的设备在电路级注入此类故障。给出了在32位微处理器上的实验结果，并指出了该方法的主要应用之一:测试序列的改进。

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Laser injection of spot defects on integrated circuits

Random spot defects may result in discrete faults such as line breaks and short circuits. Therefore they could contribute significantly to yield losses in stable fabrication lines of VLSI integrated circuits. The authors show how to use laser based equipment to inject such faults at the circuit level. Experimental results carried out on 32 bits microprocessors are presented and point out one of the main applications of this approach: the test sequence improvement.<>

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Proceedings First Asian Test Symposium (ATS `92)

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